Tuning the Nonlinear Behaviour of Resonant MEMS Sensors Actuated Electrically
نویسندگان
چکیده
منابع مشابه
Identification of nonlinear dynamic models of electrostatically actuated MEMS
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.071